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Keithley 4200A-SCS Parameter Analyzer
Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS. The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.
(I-V) Range
10 aA - 1A
0.2 µV - 210 V
(C-V) Range
1 kHz - 10 MHz
± 30V DC bias
Range
±40 V (80 V p-p), ±800 mA
200 MSa/sec, 5 ns sampling rate
Parametric insight, fast and clear.
Advancing your bold discoveries has never been easier. The 4200A-SCS Parameter Analyzer reduces the time from setup to running characterization tests by up to 50%, allowing uncompromised measurement and analysis capability. Plus, embedded measurement expertise provides unparalleled test guidance and gives supreme confidence in the resulting measurements.
Highlights
- Advanced measurement hardware for DC I-V, C-V, and pulsed I-V measurement types
- Begin testing immediately with hundreds of user-modifiable application tests included in the Clarius software
- Automated real-time parameter extraction, data graphing, analysis functions
Accurate C-V Characterization
Measure single-digit femtofarads with Keithley's newest capacitance-voltage unit (CVU), the 4215-CVU. By integrating a 1 V AC source into Keithley's industry-leading CVU architecture, the 4215-CVU offers low-noise capacitance measurements at frequencies from 1 kHz to 10 MHz.
Highlights
- First C-V meter in its class capable of driving a 1 V AC source voltage
- 1 kHz frequency resolution from 1 kHz to 10 MHz
- Measure capacitance, conductance, and admittance
- Measure on up to four channels with the 4200A-CVIV Multiswitch
Making Femtofarad (1e-15F) Capacitance Measurements with the 4215-CVU
Measure. Switch. Repeat.
The 4200A-CVIV Multi-Switch automatically switches between I-V and C-V measurements without re-cabling or lifting the prober tips. Unlike competing products, the four-channel 4200A-CVIV display provides local visual insight for quick test setup and easy troubleshooting when unexpected results occur.
Highlights
- Move C-V measurement to any device terminal without re-cabling
- User-configurable for low current capability
- Personalize the names of output channels
- View real-time test status
Stable low current measurements for I-V Characterization
With the 4201-SMU and 4211-SMU modules you can achieve stable low current measurements in a high capacitance system. With four models of source measure unit (SMU) to choose from, the 4200A-SCS can be customized to meet all of your I-V measurement needs. By offering field Installable Units and optional preamplifier modules, Keithley makes sure that you can make the most accurate low current measurements with little to no downtime.
Highlights
- Add an SMU without sending the instrument back to the factory
- Make femptoamp measurements
- Up to 9 SMU channels
- Optimized for long cables or large chucks
Integrated solution with analytical probers and cryogenic controllers
The 4200A-SCS Parameter Analyzer supports many manual and semi-automated wafer probers and cryogenic temperature controllers, including MPI, Cascade MicroTech, Lucas Labs/Signatone, MicroManipulator, Wentworth Laboratories, LakeShore Model 336 cryogenic temperature controller.
Highlights
- "Point and click" test sequencing
- "Manual" prober mode tests prober functionality
- Fake prober mode enables debugging without removing commands
Cut Costs and Protect Your Investment
Keithley Care plans provide fast, high-quality services at a fraction of the cost of on-demand service events. You are one click or phone call away from obtaining repair coverage - no quotes, purchase orders, or approval delays.
| Datasheet | Model | Description | Pricing |
|---|---|---|---|
| View Datasheet | 4200A-SCS-PKA High Resolution IV |
4200A-SCS: Parameter Analyzer mainframe 4201-SMU: Two medium power SMUs for high capacitance setups 4200-PA: One preamplifier 8101-PIV: One test fixture with sample devices |
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| View Datasheet | 4200A-SCS-PKB High Resolution IV & CV |
4200A-SCS: Parameter Analyzer mainframe 4201-SMU: Two medium power SMUs for high capacitance setups 4200-PA: One preamplifier 4215-CVU: One high resolution multi-frequency C-V unit 8101-PIV: One test fixture with sample devices |
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| View Datasheet | 4200A-SCS-PKC High Power IV & CV |
4200A-SCS: Parameter Analyzer mainframe 4201-SMU: Two medium power SMUs for high capacitance setups 4211-SMU: Two high power SMUs for high capacitance setups 4200-PA: Two preamplifier 4215-CVU: One high resolution multi-frequency C-V unit 8101-PIV: One test fixture with sample devices |
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| View Datasheet | 4200-BTI-A Ultra-fast NBTI/PBTI |
For sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology Package 4200-BTI-A includes:
|
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Biosensor Characterization
Biosensors or bioFETs convert biological response to an analyte into an electrical signal. The Clarius Software that is integrated into the 4200A-SCS includes a project for testing bioFETs. Use it as a starting point to characterize transfer and output characteristics of your biosensors, and expand your work from there.
Download the biosensor application note to get started
Femtofarad Capacitance Measurements
Measure sub-femtofarad capacitances with the 4215-CVU module. By driving 1 V AC, the 4215-CVU can achieve a noise level as low as six attofarads when measuring a 1 fF capacitor. This is just one of dozens of applications included with the Clarius software for measuring capacitance and extracting important parameters.
Making Femtofarad (1e-15F) Capacitance Measurements with the 4215-CVU
Making Optimal Capacitance and AC Impedance Measurements
Highlights
- Built-in femtofarad measurement capability
- 10,000 frequency steps from 1kHz to 10MHz
- Customize any test to any device using user libraries
Semiconductor and NVM Reliability
Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.
Evaluating Hot Carrier Induced Degradation of MOSFET Devices
Single Nanosecond Pulsing Solutions for Non-Volatile Memory Testing
Pulse I-V Characterization of Non-Volatile Memory Technologies
C-V Measurement for High Impedance Applications
Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.
Tips and Techniques to Simplilfy MOSFET/MOSCAP Device Characterization
Highlights
- .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
- 3½-digit typical resolution, minimum typical of 10 fF
Testing when using Long Cables or Capacitive Fixtures
Use 4201 or 4211-SMUs when making tests requires very long cabling or fixtures with higher capacitances. These SMUs are ideal for connecting to LCD test stations, probers, switch matrices or any other large or complicated tester. Field installable versions allow you to add capacity without returning the unit to a service center.
Resistivity of Materials
Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >1016 ohms give you more accurate and precise results.
van der Pauw and Hall Voltage Measurements with the 4200A-SCS Parameter Analyzer
MOSFET Characterization
The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.
C‑V Characterization of MOS Capacitors Using the 4200A-SCS Parameter Analyzer
| View Datasheet | Data Sheet | Module | Description |
|---|---|---|---|
| View Datasheet | 4200-BTI-A | ULTRA FAST BTI PKG | Description |
| View Datasheet | 4200-SMU | MEDIUM POWER SOURCE-MEASURE UNIT | Description |
| View Datasheet | 4200-PA | REMOTE PREAMPLIFIER MODULE | Description |
| View Datasheet | 4200A-CVIV | I-V/C-V MULTI-SWITCH MODULE | Description |
| View Datasheet | 4201-SMU | MEDIUM POWER SOURCE-MEASURE UNIT | Description |
| View Datasheet | 4210-CVU | CAPACITANCE-VOLTAGE UNIT | Description |
| View Datasheet | 4210-SMU | HIGH POWER SOURCE-MEASURE UNIT | Description |
| View Datasheet | 4211-SMU | HIGH POWER SOURCE-MEASURE UNIT | Description |
| View Datasheet | 4215-CVU | CAPACITANCE-VOLTAGE UNIT | Description |
| View Datasheet | 4220-PGU | HIGH VOLTAGE PULSE GENERATOR UNIT | Description |
| View Datasheet | 4225-RPM | REMOTE PREAMPLIFIER/SWITCH MODULE | Description |
| View Datasheet | 4225-PMU | ULTRA-FAST PULSE MEASURE UNIT | Description |
Automated Control from Lab to Fab
Keithley's Automated Characterization Suite (ACS) offers complete control of your equipment. Whether you need to control a few instruments on your bench, or automate an entire test rack for production, ACS offers a flexible, interactive environment for device characterization, parametric test, reliability test, and simple functional test.
- Perform simple 1-off tests or build complex project trees
- Code with Python inside ACS for unlimited flexibility and control
- Manual or automated wafer prober control
- Data management and statistical analysis capabilities
Clarius+ Analysis Suite
The Clarius+ software suite makes it easy to get characterization insights on your materials and devices. It runs natively on the 4200A-SCS to plan, configure, and analyze results of your tests. Clarius can also be installed on any Windows 10 PC to plan and configure tests before running them in your lab, or analyze data after it's gathered.
- Over 200 pre-configured tests to get your lab running faster
- Real example data curated gathered by Keithley engineers
- Built-in contextual help and application notes
- Monitor Mode to view results real-time