Keithley Parametric Test Systems

S530 Parametric Test Systems are designed for production and lab environments that must handle a broad range of devices and technologies, offering industry-leading test plan flexibility, automation, probe station integration, and test data management capabilities. Keithley has brought more than 30 years of expertise in delivering a wide range of standard and custom parametric testers to customers around the world to the design of these test solutions.

The S535 Multi-Site Wafer Acceptance Test System is a high-power, high-resolution wafer-level solution for testing analog, power, mixed-signal, and discrete devices in applications across the fab workflow. Unlike conventional asynchronous parallel test schemes that test mutiple devices on one site at the same time, the S535's multi-parallel test method tests multiple devices on multiple sites at the same time. This reduces prober index time by at least 2x, thus boosting fab productivity and lowering the cost of test.

The 540 Parametric Test System is a fully-automated, 48 pin parametric test system for wafer-level testing of power semiconductor devices and structures up to 3kV. Optimized for use with the latest compound power semiconductor materials including silicon carbide (SiC) and gallium nitride (GaN), the fully integrated S540 can perform all high voltage, low voltage, and capacitance tests in a single probe touch-down.

S500 Integrated Test Systems are highly configurable, instrument-based systems for semiconductor characterization at the device, wafer, or cassette level. Built on our proven instrumentation, S500 Integrated Test Systems provide innovative measurement features and system flexibility, scalable to your needs. The unique measurement capability, combined with the powerful and flexible Automated Characterization Suite (ACS) software, provides a comprehensive range of applications and features not offered on other comparable systems on the market. 

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Keithley Parametric Test Systems

S530 Features

  • Readily adaptable to new devices and test requirements
  • Fast, flexible, interactive test plan development
  • Compatible with popular fully automatic probe stations
  • Options for 1kV, C-V, pulse generation, frequency measurements, and low-voltage measurements
  • Compatible with Keithley's Model 9139B Probe Card Adapter
  • Supports reuse of existing five-inch probe card libraries
  • Proven instrumentation technology ensures high measurement accuracy and repeatability in both the lab and the fab
  • Provides SECS/GEM integration with 300 mm wafer fabs

S535 Features

  • Automatically perform all wafer-level DC parametric tests in a multi-site parallel or serial operation. Test two or four sites in a single probe touch-down.
  • Up to 64 test pins: Four sites test in parallel, 16 pins per site; two sites tested in parallel, 32 pins per site; single-site, serial operation, 64 pins
  • Up to 100 W operation: 100 V @ 1 A; 200 V @ 100 mA
  • 1 fA, 10 nV resolution in a high-speed, multi-pin, fully-automated test environment
  • Linux-based Keithley Test Environment (KTE) system software for compatibility with legacy Keithley test systems, easy test development, and fast execution.
  • Keithley S530-style probe card infrastructure also supports legacy S400 applications
  • Provides SECS/GEM integration with 300 mm wafer fabs

S540 Features

  • Automatically perform all wafer-level parametric tests on up to 48 pins, including high voltage breakdown, capacitance, and low voltage measurements, in a single probe touch-down without changing cables or probe card infrastructure
  • Perform transistor capacitance measurements such as Ciss, Coss, and Crss up to 3kV without manual reconfiguration of test pins
  • Achieve low-level measurement performance in a high-speed, multi-pin, fully-automated test environment
  • Linux-based Keithley Test Environment (KTE) system software enables easy test development and fast execution
  • Ideal for fully- or semi-automatic applications in process integration, process control monitoring, and production die sort
  • Lowers the cost of ownership by minimizing test time, test set-up time, and floor space while achieving lab-grade measurement performance
  • Provides SECS/GEM integration with 300 mm wafer fabs

S500 Features

  • Full-range source measurement unit (SMU) instrument specifications, including subfemtoamp measurement, ensure a wide range of measurements on almost any device.
  • Pulse generation and ultra-fast I-V for memory characterization, charge pumping, singlepulse PIV (charge trap analysis), and PIV sweeps (self-heating avoidance).
  • Low or high channel-count systems, including parallel test, with Keithley's system-enabling and scalable SMU instruments.
  • High voltage, current, and power source-measure instrumentation for testing devices such as power MOSFETs and display drivers.
  • Switching, probe cards, and cabling take the system all the way to your DUT.
S530/S530-HV Parametric Test Systems

Literature Number: 1KW-60240-1
Datasheet
S535 Multi-Site Wafer Acceptance Test System

Literature Number: 1KW-61422-0
Datasheet
S540 Power Semiconductor Test System Datasheet
The Keithley S540 is a fully-automated, wafer-level parametric test system that can perform all high voltage, low voltage, low current, and capacitance tests up to 3kV in a single probe touch-down to maximize productivity and minimize cost of …

Literature Number: 1KW-60909-1
Datasheet
S500 Data Sheet
Datasheet
KIGEM Automation Software Release Notes
The release notes for KIGEM 5.7.2b.

Keithley Instruments 300mm SECS/GEM Automation Interface (KIGEM) on the S530 Parametric Test system provides an interface that complies with both the traditional SECS/GEM standards and the newer set of 300mm SEMI standards. It allows S530 systems to be integrated into fully-automated semiconductor fabrication facilities.


Part Number: KIGEM-910-01B
Release Notes Manual
S530-S535-S540 KTE 5.8.2 Release Notes

This document contains information on enhancements, critical and noncritical fixes, and known issues for each released version of the Keithley Test Environment (KTE) software.


Part Number: PA-1036V
Release Notes Manual
Performing van der Pauw Sheet Resistance Measurements Using the Keithley S530 Parametric Tester
Application Note Marketing Document
S530 Parametric Test System Specifications
S530 Parametric Test System Specifications

Literature Number: SPEC-S530D
Specification Marketing Document
S530 Parametric Test Systems with KTE - Quick and Seamless Integration with Existing S400 and S600 Systems
Brochure Marketing Document
S535 Wafer Acceptance Test System Specifications
Specifications document for S535 Wafer Acceptance Test System

Literature Number: SPEC-S535A
Specification Marketing Document
S530 Semiconductor Parametric Test System: Cost effective, high throughput solutions
Fact Sheet Marketing Document
S540 Power Semiconductor Test System Specifications
Specifications document for S540 Power Semiconductor Test System

Literature Number: SPEC-S540A
Specification Marketing Document
Programming and Erasing Flash Memory Devices Using the Keithley S530 Pulse Generator Option
Application Note Marketing Document
9139B Probe Card Adapter Gerber Files
Specification Marketing Document
9140A Probe Card Adapter Gerber Files
Specification Marketing Document
Multi-Site Parallel Testing with the S535 Wafer Acceptance Test System
In semiconductor wafer production, minimizing the cost of test has been identified as the number one challenge.  The biggest factor in the cost of test, as well as in the cost of test system ownership, is throughput of the tester/prober combination …

Literature Number: 1KW-61423-0
Application Note Marketing Document
Achieving Maximum Throughput with Keithley S530 Parametric Test Systems
Keithley Instruments is a world leader in the development of precision DC electrical instruments and integrated parametric test systems. Its expertise in parametric test technology goes back to the early days of the semiconductor industry and …
Application Note Marketing Document
Understanding Control Systems and Communications for Today's Automobiles
Fact Sheet Marketing Document
Gearing Up for Parametric Test's High Voltage Future
Whitepaper Marketing Document
Making Ring Oscillator Measurements with the Model S530 Parametric Test System's Frequency Measurement Option
Application Note Marketing Document
High Voltage Wafer Testing in a Production Environment with the HV S540 Parametric Test System

Literature Number: 1KW-60936-2
Application Note Marketing Document
Test Methods for Automobile Communication and Control Systems
Fact Sheet Marketing Document
Touch, Test, Invent with the Next Generation Current and Voltage Source-Measure Instruments
Fact Sheet Marketing Document
Measuring MOSFET Gate Charge Using the S530 and S540 Parametric Test Systems
This application note describes how to make gate charge measurements on a MOSFET based on the JEDEC Gate Charge Test Method.

Literature Number: 1KW-61389-0
Application Note Marketing Document
Greater Reliability Testing Confidence from Lab to Fab - Wafer Level Reliability Test Solutions
Keithley Instruments has long been an industry leader in both overall parametric test technology and wafer level reliability (WLR) testing. Several generations of Keithley’s parametric test solutions have offered WLR test algorithm libraries as …
Poster Marketing Document
Wafer Level Reliability Systems
Brochure Marketing Document
9139B Probe Card Adapter
The 9139B-PCA Probe Card Adapter is an option for Keithley’s S530 and S535 Parametric Test Systems and S500 Integrated Test Systems.  It also provides probe-card compatibility with Keithley’s previous generation S400 Parametric Test System.

Literature Number: 1KW-61585-0
Datasheet